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Detection of impurity segregation in zone-confined, polycrystalline tin-doped indium oxide thin films by STM and AFM
Authors:I. A. Rauf   F. Czerwinski   J. D. Boyd  J. A. Szpunar
Affiliation:

* Department of Materials and Metallurgical Engineering, Queen's University, Kingston, Ontario, Canada K7L 3N6

Department of Mining and Metallurgical Engineering, McGill University, Montreal, Quebec, Canada H3A 2A7

Abstract:This paper discusses the possibility of using STM and AFM to image the dopant material in a segregated state. Samples of tin-doped indium oxide were prepared using a zone-confining process. The resultant material has dopant species segregated over certain grain boundaries at desired positions while the others remain dopant free. Samples were then imaged using STM, AFM and STEM. Enhanced contrast from the dopant rich grain boundaries and a larger grain size are observed at the surface making an interface with the substrate as compared to the free surface of the sample, while secondary electron STEM images show these grains to be smaller in size and the boundaries to be almost physically flat. This is interpreted to be a consequence of the zone-confining effect.
Keywords:dopant segregation   zone-confining   STM   AFM   CTEM   STEM   ITO   thin films   grain boundary segregation
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