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Effect of annealing on the structural properties of arsenic-implanted mercury cadmium telluride
Authors:II Izhnin  OI Fitsych  Z Świątek  Y Morgiel  OYu Bonchyk  HV Savytskyy  KD Mynbaev  AV Voitsekhovskii  AG Korotaev  MV Yakushev  DV Marin  VS Varavin  SA Dvoretsky
Institution:1. Scientific Research Company “Electron-Carat”, Lviv, 79031, Ukraine;2. National Research Tomsk State University, Tomsk, 634050, Russia;3. Hetman Petro Sahaidachny National Army Academy, Lviv, 79012, Ukraine;4. Institute of Metallurgy and Material Science PAN, Krakow, 30-059, Poland;5. Ya.S. Pidstryhach Institute for Applied Problems of Mechanics and Mathematics NASU, Lviv, 79060, Ukraine;6. Ioffe Institute, Saint–Petersburg, 194021, Russia;7. ITMO University, Saint–Petersburg, 197101, Russia;8. A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, 630090, Russia
Abstract:Effect of annealing on the structural properties of arsenic-implanted mercury cadmium telluride film grown by molecular beam epitaxy was studied with the use of transmission electron microscopy and optical reflection. Strong influence of the graded-gap surface layer grown on top of the film on the behaviour of implantation-induced defects under arsenic activation annealing was revealed and interpreted.
Keywords:HgCdTe  Implantation  Defects  Microscopy
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