Angle-resolved X-ray fluorescence spectrometry using synchrotron radiation at ELSA

Measurements on the centroid depth of ion-implanted phosphorus-in-silicon specimen by the method of angle-resolved, self-ratio X-ray fluorescence spectrometry (AR/SR/XFS) have been carried out using white synchrotron radiation (SR). The measurements were performed using a modified wavelength-dispersive fluorescence spectrometer. Problems due to the use of SR, like carbonaceous specimen contamination and sample heating were overcome by flooding the specimen chamber with helium and by pre-absorbing the non-exciting parts of the incident SR with suitable filters, respectively. The decaying primary intensity was monitored by measuring the compensation current of the photoelectrons emitted from a tungsten wire stretched across the primary beam. Results have been obtained for specimen with dose density levels of 10¹⁶ cm^–2 and 3×10¹⁵ cm^–2.