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Reduction of the phosphorus contamination for plasma deposition of p-i-n microcrystalline silicon solar cells in a single chamber |
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| Authors: | Wang Guang-Hong Zhang Xiao-Dan Xu Sheng-Zhi Zheng Xin-Xi Wei Chang-Chun Sun Jian Xiong Shao-Zhen Geng Xin-Hua Zhao Ying |
| Affiliation: | Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-electronic Thin Film Devices and Technology of Tianjin, Key Laboratory of Opto-electronic Information Science and Technology, Ministry of Education, Tianjin 300071, China |
| Abstract: | phosphorus contamination, single chamber, microcrystalline silicon, solar cells |
| Keywords: | phosphorus contamination single chamber microcrystalline silicon solar cells |
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