|
|||||
|
|
Reduction of the phosphorus contamination for plasma deposition of p-i-n microcrystalline silicon solar cells in a single chamber |
|
| Authors: | Wang Guang-Hong Zhang Xiao-Dan Xu Sheng-Zhi Zheng Xin-Xi Wei Chang-Chun Sun Jian Xiong Shao-Zhen Geng Xin-Hua and Zhao Ying |
| Institution: | Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-electronic Thin Film Devices and Technology of Tianjin, Key Laboratory of Opto-electronic Information Science and Technology, Ministry of Education, Tianjin 300071, China |
| Abstract: | phosphorus contamination, single chamber, microcrystalline silicon, solar cells |
| Keywords: | phosphorus contamination single chamber microcrystalline silicon solar cells |
| 本文献已被 维普 等数据库收录！ | |
| 点击此处可从《中国物理 B》浏览原始摘要信息 | |
| 点击此处可从《中国物理 B》下载免费的PDF全文 | |