磁性量子元胞自动机功能阵列的实验研究

采用电子束光刻、热蒸镀和剥离工艺在室温下制备了多组磁性量子元胞自动机器件功能阵列. 实验研究了曝光剂量和曝光时间对三个不同间距参数磁性量子元胞自动机阵列图案的影响, 发现100 pA电子束束流和0.38 μs曝光时间可获得理想的阵列图案. 对制备的反相器阵列结构进行了磁力显微测试, 结果显示了正确的逻辑功能, 成功实现了不同间距参数功能阵列的实验制备. 此外, 实验还发现纳磁体阵列制备中容易出现缺陷, 模拟结果表明丢失纳磁体缺陷导致了信号传递反相.

Experimental study of magnetic quantum-dot cellular automata function arrays

Magnetic quantum-dot cellular automata(MQCA) function arrays are fabricated by electron beam lithography,thermal evaporation and lift-off technologies at room temperature.The effects of exposure dose and exposure time on MQCA function array patterns with three various spacings are experimentally investigated.The results show that the ideal pattern can only be obtained with 100 pA electron beam current and 0.38 lis exposure time.Magnetic force microscopy measurement on the fabricated inverter structure shows that the array demonstrates correct logic operation,which validates the feasibility of fabrication process for MQCA function arrays. Moreover,defect is observed in the experiments,simulations on the defective array show that missing nanomagnet defect in the array leads to signal inversion error.