Graphical analysis of Rutherford backscattering spectra |
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| Authors: | C. V. Barros Leite G. B. Baptista E. C. Montenegro A. S. Paschoa |
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| Affiliation: | (1) Departamento de Física, Pontificia Universidade Católica, P.O. Box 38071, 22453 Rio de Janeiro, RJ, (Brasil) |
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| Abstract: | A graphical method was developed to relate data from Rutherford backscattering spectrometry to sample characteristics, such as thickness and concentration profiles. The method was then applied to analyze these characteristics of a gold film. |
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