Improvement of optical sensing performances of a double-slot-waveguide-based ring resonator sensor on silicon-on-insulator platform |
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Authors: | Guohui Yuan Liang GaoYuren Chen Xinli LiuJun Wang Zhuoran Wang |
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Affiliation: | The State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan, China |
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Abstract: | We demonstrate a label-free photonic biosensor with double slots based on micro-ring resonator. The footprint is less than 25 μm × 15 μm. Finite-difference time-domain (FDTD) method is used to analyze the influence of several key parameters on the performance of the double-slots micro-ring resonators. An asymmetric structure is considered for the ring waveguide in order to improve the sensor's bending efficiency. Our numerical analysis shows that the sensitivity of double-slot micro-ring resonator sensor with the radius of 5 μm reaches a value of 708 nm/RIU. The quality factor of 580 and the free spectral range (FSR) of 33 nm are achieved. |
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Keywords: | Biosensor Slot waveguide Ring resonators Silicon-on-insulator (SOI) |
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