Fabrication and characterization of a planar interleaved micro-transformer with magnetic core |
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Authors: | F Kahlouche K Youssouf MH Bechir S Capraro A Siblini JP Chatelon C Buttay JJ Rousseau |
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Institution: | 1. Université de Lyon, F-42023 Saint Etienne, France;2. Université de Saint Etienne, Jean Monnet, F-42023 Saint Etienne, France;3. LT2C, F-42023 Saint Etienne, France;4. Laboratoire Ampère INSA-Lyon, 20 avenue Einstein, 69621 Villeurbanne Cedex, France |
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Abstract: | This paper presents the design, the fabrication and the characterization of a planar interleaved micro-transformer with an Yttrium Iron Garnet (YIG) core. The design of this micro-transformer and the manufacturing steps are presented. HFSS software is used for the conception and the simulation of the interleaved magnetic micro-transformer. It is composed of two identical windings. A bottom magnetic core is used to improve the integrated transformer performances. To form the windings, we have used a surface micromachining process. We have also used a negative photoresist (SU-8) as an insulating layer and as support for the fabrication of a bridge to connect the central end of the coils to the ground shield. The micro-transformer have been characterized with impedance meter up to 100 MHz, and completed to 1 GHz using vector network analyzer. |
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Keywords: | Planar micro-transformer Magnetic material Interleaved Micromachining |
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