A novel integrated MEMS helix antenna for terahertz applications

This paper reports the design and analysis of a novel helix antenna based on Micro-electromechanical Systems (MEMS) technology, which is used in terahertz (THz) applications. The structure of the antenna includes two parts, the metallic helix and the coplanar waveguide (CPW) on the substrate for feed, the fabrication of the structure needs only one wafer, and the antenna can be easily integrated with other parts of on-chip circuits. There are many tunable parameters of the helix, so that high performance THz antenna can be achieved by optimizing these parameters. The proposed antenna can be manufactured by MEMS processing with low fabrication cost, suitable for many terahertz systems.