Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique |
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Authors: | Kejun Zhong Yiqing Gao Feng Li Zhimin Zhang Ningning Luo |
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Affiliation: | 1. College of Automation Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;2. Key Laboratory of Nondestructive Testing (Ministry of Education), Nanchang Hangkong University, Nanchang 330063, China |
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Abstract: | This paper presents a facile and effective method to fabricate microlens array in polydimethylsiloxane (PDMS). The microlens array model is fabricated in photoresist via digital maskless grayscale lithography technique and the replica molding technique is used to fabricate PDMS microlens array. A convex PDMS microlens array with rectangular aperture and concave PDMS microlens array with hexagonal aperture are fabricated. The morphological characteristics of the microlens arrays are measured by microscope and 3D profiler. The results indicate that the profiles of the PDMS microlens arrays are clear and distinct. This method provides a simple and low-cost approach to prepare large area, concave or convex with arbitrary shape microlens array, which has potential application in many optoelectronic devices. |
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Keywords: | Convex/concave microlens array Maskless grayscale lithography Replica molding PDMS |
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