| 摘 要： | Ferroelectric Pb(Zr_(0.60)Ti_(0.40))O_3 thin films deposited on the niobium-doped SrTiO_3 and Pt(111)/Ti/SiO_2/Si substrates are fabricated by a sol-gel method.X-ray diffraction indicates that the films have a 'cube-on-cube'growth with highly(100)preferred orientation and good surface qualities.Using piezoelectric force microscopy,we investigate domain structures and butterfly amplitude loops of ferroelectric thin fims.The results indicate that the film deposited on Nb:SrTiO_3 has both kinds of 180° polarizations perpendicular or parallel to the surface while the film deposited on Pt/Ti/SiO_2/Si has irregular phase differences.Excellent piezoelectric polarization are observed in the films on niobium-doped SrTiO_3 with local d_(33)~* values around 45 pm/V three times more than that of the films around 13 pm/V deposited on Pt(111)/Ti/SiO2/Si. Our findings emphasize that nanodomain switching ability and non-180° domains will contribute significantly to enhance piezoelectric responses of ferroelectric thin films.
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