The angle-limited integrated scattering (ALIS) measurement system for in-workshop inspection of the optical polishing process

A simple angle-limited integrated scattering (ALIS) measurement technique is described. The relation between the measured scattering within a limited solid angle (ALIS) and the root-mean-square (RMS) roughness of the surface under test is investigated. The technique is applied to the in-workshop inspection of the optical polishing process.