| 用卢瑟福背散射和弹性背散射分析高Tc超导薄膜中的元素组份及氧含量 |
| |
| 引用本文： | 任孟眉,江伟林,朱沛然.用卢瑟福背散射和弹性背散射分析高Tc超导薄膜中的元素组份及氧含量[J].物理学报,1994,43(2):340-344. |
| |
| 作者姓名： | 任孟眉 江伟林 朱沛然 |
| |
| 作者单位： | 中国科学院物理研究所 |
| |
| 摘 要： | 提出了用能量为１．５－２．５ＭｅＶ的质子弹性背散射分析（ｅｌａｓｔｉｃ ｂａｃｋｓｃａｔｔｅｒｉｎｇ，缩写为ＥＢＳ）来测定薄膜中的氧含量，这个方法对于厚度为几十纳米到几个微米的样品，测量精度约５％。采用ＲＢＳ分析并结合ＥＢＳ分析，可全面测得薄膜中各元素的含量。
关键词：
|
| 关 键 词： | 超导膜 氧含量 背散射 元素组分 |
| 收稿时间： | 1993-04-13 |
COMPOSITION ANALYSIS AND OXYGEN CONTENT DETERMINATION OF HIGH T SUPERCONDUCTING FILMS BY RBS AND EBS METHODS |
| |
| REN MENG-MEI,JIANG WEI-LIN and ZHU PEI-RAN.COMPOSITION ANALYSIS AND OXYGEN CONTENT DETERMINATION OF HIGH T SUPERCONDUCTING FILMS BY RBS AND EBS METHODS[J].Acta Physica Sinica,1994,43(2):340-344. |
| |
| Authors: | REN MENG-MEI JIANG WEI-LIN and ZHU PEI-RAN |
| |
| Abstract: | In this paper, a technique of proton elastic backscattering (EBS) in the energy range of 1.5-2.5MeV is proposed for the measurement of the total contents of oxy-gen in the films. The accuracy is better than 5% for the film thickness between less than hundreds nm to a few microns. |
| |
| Keywords: | |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《物理学报》浏览原始摘要信息 |
| 点击此处可从《物理学报》下载免费的PDF全文 |
