| 希尔伯特变换条纹分析法及其在非球面镜测量上的应用 |
| |
| 引用本文： | 吕捷,王鸣,宦海,张斌. 希尔伯特变换条纹分析法及其在非球面镜测量上的应用[J]. 光学学报, 2005, 25(6): 81-785 |
| |
| 作者姓名： | 吕捷 王鸣 宦海 张斌 |
| |
| 作者单位： | 南京师范大学物理科学与技术学院,南京,210097;南京财经大学信息工程学院,南京,210003;南京师范大学物理科学与技术学院,南京,210097;南昌大学机电工程学院,南昌,330029 |
| |
| 基金项目： | 江苏省光电技术重点实验室开放基金(KJS01040)，江西省科委科技攻关项目(200110201500)资助课题。 |
| |
| 摘 要： | 提出了利用离散的希尔伯特变换法解调干涉条纹相位的方法，叙述了希尔伯特变换法解调相位的原理，并从单一的干涉图样中提取出条纹信号的正弦和余弦部分，正弦与余弦比值的反正切即为干涉相位；然后利用泽尼克多项式拟合，实现波前重建；最后讨论了条纹相位的算法，误差修正和测量面形的应用，从而实现对非球面镜的检测。实验表明，该方法可获得均方根(RMS)的精度为λ／10。
|
| 关 键 词： | 光学测量 干涉法 条纹分析 希尔伯特变换 非球面 离散信号处理 |
| 收稿时间： | 2004-01-17 |
Fringe Analysis with Hilbert Transform and Its Application in the Measurement of Aspheric Mirror |
| |
| Lü Jie,Wang Ming,Huan Hai,Zhang Bin. Fringe Analysis with Hilbert Transform and Its Application in the Measurement of Aspheric Mirror[J]. Acta Optica Sinica, 2005, 25(6): 81-785 |
| |
| Authors: | Lü Jie Wang Ming Huan Hai Zhang Bin |
| |
| Abstract: | A method for interferometric phase's demodulation with a discrete Hilbert transform is proposed. A Hilbert transform demodulated phase principle is represented and the phase information of aspheric surface is evaluated only one interferogram. The sine and cosine components are calculated from a single interference signal. Then wavefront reconstruction is achieved using Zernike polynomical fitting. In addition, the phase-extraction algorithm, error correction and some applications to the measurement of the surface shape are discussed. On-line measurements to aspheric surface are realized. Several experiments showed the accuracy of the measurement to be λ/10 ( RMS). |
| |
| Keywords: | optical measurement interferometry fringe analysis Hilbert transform aspheric surface discrete signal processing |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
