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| A novel method to determine the FOCAL energy range | |
| 作者姓名： | 张冬青 王向朝 施伟杰 |
| 作者单位： | Information Optics Laboratory，Shanghai Institute of Optics and Fine Mechanics，Chinese Academy of Sciences，Shanghai 2018002 Graduate School of the Chinese Academy of Sciences，Beijing 100039，Information Optics Laboratory，Shanghai Institute of Optics and Fine Mechanics，Chinese Academy of Sciences，Shanghai 2018002，Information Optics Laboratory，Shanghai Institute of Optics and Fine Mechanics，Chinese Academy of Sciences，Shanghai 2018002 |
| 摘 要： | As the critical dimensions in the semiconductor industryare shrinking, fast and accurate in-situ measurements ofprojection optics aberrations of lithographic tools becomeincreasingly necessary. Focus calibration using alignmentprocedure (FOCAL) [1-4] is an important technique usedfor self-calibration[5-8] of deep-ultraviolet (DUV) litho-graphic tools[9,10]. With this technique, imaging qualityparameters, such as best focus, image tilt, field curva-ture, and so on, can be measured accurately… |
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