Dependence of RuO2-capacitive properties on preparation conditions

The effect of a small change in the preparation conditions and the consequences thereof on the capacitive properties of RuO₂ thin films are described. The oxide films are prepared using the Pechini method and the only alteration made in the procedure is to change the order of addition of reagents. The solution color changes as a consequence and also the capacitance values, from 54.8 to 33.6 F g⁻¹, for the oxides obtained after calcination. These results could be related to the calcination kinetics, which affects the lattice stress in the oxide as calculated using X-ray diffraction patterns and Rietveld analysis.