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Fabrication and Frequency Response Characteristics of A1N-Based Solidly Mounted Resonator |
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| Authors: | XIONG Juan GU Hao-Shuang HU Kuan HU Ming-Zhe |
| Institution: | Department of Physics and Electronic Technology, Key Laboratory of Ferroelectric and Piezoelectric Materials and Devices of Hubei Province, Hubei University, Wuhan 430062 |
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