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Surface Micromachined Adjustable Micro-Concave Mirror for Bio-Detection Applications
Institution:[1]Department of Automation Engineering, National Formosa University, Yunlin 632 [2]Common Lab for Micro/Nano Science and Technology, National Formosa University, Yunlin 632 [3]Institute of Electro-Optical and Materials Science, National Formosa University, Yunlin 632
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