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Characterization of Thick GaN Films Directly Grown on Wet-Etching Patterned Sapphire by HVPE |
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| Authors: | HU Qiang WEI Tong-Bo DUAN Rui-Fei YANG Jian-Kun HUO Zi-Qiang LU Tie-Cheng ZENG Yi-Ping |
| Affiliation: | [1]Department of Physics and Key Laboratory for Radiation Physics and Technology of Ministry of Education, Sichuan University, Chengdu 610064 [2]Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083 |
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