| 碳/碳复合材料应用于直拉硅单晶生长的研究 |
| |
| 引用本文： | 王世援,韩焕鹏,刘锋.碳/碳复合材料应用于直拉硅单晶生长的研究[J].电子工业专用设备,2011,40(4):29-33. |
| |
| 作者姓名： | 王世援 韩焕鹏 刘锋 |
| |
| 作者单位： | 中国电子科技集团公司第四十六研究所,天津,300220 |
| |
| 摘 要： | 介绍了热系统在直拉硅单晶中的作用,对比了石墨与碳/碳复合材料的生产过程和性能特点与差异.通过在单晶炉上的实验应用,证明了碳/碳复合材料比石墨材料具有更好的实际应用效果,在直拉硅单晶领域具有很好的应用潜力.分析了碳/碳复合材料的一些不足,并提出了相应的解决方案.
|
| 关 键 词： | 碳/碳复合材料 直拉单晶炉 热系统保温装置 |
The Research of the Carbon-Graphite Materials Using for the CZ Crystal Growth |
| |
| WANG Shiyuan,HAN Huanpeng,LIU Feng.The Research of the Carbon-Graphite Materials Using for the CZ Crystal Growth[J].Equipment for Electronic Products Marufacturing,2011,40(4):29-33. |
| |
| Authors: | WANG Shiyuan HAN Huanpeng LIU Feng |
| |
| Institution: | WANG Shiyuan,HAN Huanpeng,LIU Feng (The 46th research institute of CETC,Tianjin 300220,China) |
| |
| Abstract: | This paper describe the effect of hot zone in the CZ crystal growth,analyse then compare the characters and differents of the making process between Graphite Material and Carbon-Graphite Material.with the results of the experiment in using both materials in the growth of CZ crystal growth,certify that the Carbon-Graphite Materials have better effect than the Graphite Material,so the Carbon-Graphite Material should be a very potential material in the region of CZ products growth.The last but not least,analys... |
| |
| Keywords: | Carbon-Graphite Material CZ crystal growth furnace System of heat isolating |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
