| 太阳能电池生产线中新型等离子体刻蚀机刻蚀工艺探讨 |
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| 引用本文： | 陈特超,马度·巴布,李健志,毛朝斌. 太阳能电池生产线中新型等离子体刻蚀机刻蚀工艺探讨[J]. 电子工业专用设备, 2011, 40(6): 5-6,48 |
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| 作者姓名： | 陈特超 马度·巴布 李健志 毛朝斌 |
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| 作者单位： | 1. 中国电子科技集团公司第四十八研究所,湖南长沙,410111
2. UAE Fujairah Ishan能源公司，印度 |
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| 摘 要： | 介绍了一种新型等离子体刻蚀机的使用条件,通过对各种参数变化的组合实验,得到了最佳工艺数据.利用该刻蚀机生产的电池片刻蚀效果好,刻蚀后经检测,电池片漏电流小,并联电阻大,提高了电池片的综合性能指标.
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| 关 键 词： | 等离子体 刻蚀 工艺 实验 |
Solar Cell Production Line in the New Technology of Plasma Etching Machine |
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| CHEN Techao,Madhu Babu,LI Jianzhi,MAO Chaobin. Solar Cell Production Line in the New Technology of Plasma Etching Machine[J]. Equipment for Electronic Products Marufacturing, 2011, 40(6): 5-6,48 |
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| Authors: | CHEN Techao Madhu Babu LI Jianzhi MAO Chaobin |
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| Affiliation: | CHEN Techao1,Madhu Babu 2,LI Jianzhi1,MAO Chaobin1 (1.The 48th Research Institute of CETC,Changsha 410111,2.Microsol International LL FZE,Indian) |
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| Abstract: | This article introduces a new type of plasma etching machine's conditions of use,through a combination of various experimental parameters it had obtain the optimum data.Make use of the etching machine production of battery slice corrosion moment has good effect,etched by the experiment,battery slice leakage current are less,shunt resistance are high and it improve the general performance of the battery slice. |
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| Keywords: | Plasma Etching Process Experiment |
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