| 并行共焦三维检测方法的理论分析 |
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| 引用本文： | 田维坚,陈波,郭履容,庞霖.并行共焦三维检测方法的理论分析[J].光学学报,1999,19(10):381-1385. |
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| 作者姓名： | 田维坚 陈波 郭履容 庞霖 |
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| 作者单位： | 1. 浙江工业大学现代光学仪器国家重点实验室,杭州,310027
2. 四川大学信息光学研究中心,成都,610064 |
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| 基金项目： | 国家自然科学基金，中国博士后科学基金 |
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| 摘 要： | 从一般共焦系统的原理出发，重点围绕并行共焦方法的三维检测，通过引用三维点扩散函数和矩阵形式，研究了并行共焦检测方法的理论问题，确立了点阵并行共焦检测方法的检测过程。其结果表明，并行共焦检测过程总的光场分布，是各条共焦检测光路的求和，且都符合两个点扩散函数相乘的共焦形式。
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| 关 键 词： | 并行共焦 三维检测 点扩散函数 矩阵形式 |
| 收稿时间： | 1998/12/28 |
Theoretical Analysis for Parallel Confocal Detecting Method |
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| Tian Weijian,Chen Bo,Guo Lurong,Pang Lin.Theoretical Analysis for Parallel Confocal Detecting Method[J].Acta Optica Sinica,1999,19(10):381-1385. |
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| Authors: | Tian Weijian Chen Bo Guo Lurong Pang Lin |
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| Abstract: | The basic principle of parallel confocal detecting method is proposed. With the 3 D point spread function and the matrix operating form, the mathematical model of 3 D detecting process based on the method is established, which has a higher theoretic value and a wider suitability due to the involvement of the general confocal and non confocal detection. Meanwhile, the conclusion of theoretical analysis shows that the optical detection of parallel confocal method conforms to the multiplication form of two point spread functions, which is the fundamental characteristic of confocal detection. |
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| Keywords: | parallel confocal 3 D detecting point spread function matrix operating form |
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