| 微器件的热学加工技术研究与应用 |
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| 引用本文： | 白晓丹,刘静.微器件的热学加工技术研究与应用[J].微纳电子技术,2004,41(5):1-12. |
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| 作者姓名： | 白晓丹 刘静 |
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| 作者单位： | 中国科学院理化技术研究所,北京,100080 |
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| 基金项目： | 国家自然科学基金项目(50176053,50325622)，中科院创新基金项目资助 |
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| 摘 要： | 归纳和总结了微系统热学加工技术方面的最新研究进展,着重讨论从材料的热学性质出 :发,实现微 /纳电子机械系统元件制造的若干新颖、低成本的方法,并特别介绍其中一些典型应用情况。通过分析表明,随着对微加工过程中一些关键热学机理的深入研究,许多现有技术瓶颈和界限均可望被逐步打破,从而促成更有效的微加工技术的建立。
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| 关 键 词： | MEMS NEMS 热加工 微尺度 微铸 LIGA 微电火花 微喷墨加工 |
| 文章编号： | 1671-4776(2004)05-0001-12 |
| 修稿时间： | 2004年2月3日 |
Research and application of thermally enabled fabrication of micro-device |
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| BAI Xiao,dan,LIU Jing.Research and application of thermally enabled fabrication of micro-device[J].Micronanoelectronic Technology,2004,41(5):1-12. |
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| Authors: | BAI Xiao dan LIU Jing |
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| Abstract: | The latest research advancement in the thermally enabled fabrication of micro/nano electro mechanical systems(M/NEMS)are summarized and reviewed. Several novel and low cost approaches to manufacture the M/NEMS components by making use of the material thermal properties are particularly discussed. Some of these typical applications were introduced. It was shown that,through probing into the key thermal mechanisms involved in the micro fabrication processes,some of the bottlenecks and boundaries in currently existing technologies could possibly be broken,which would therefore innovate the establishment of more powerful micro fabrication methods |
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| Keywords: | MEMS NEMS thermal fabrication micro scale thermal molding LIGA micro electro-discharge micro ink-jet printed fabrication |
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