| 激基激光对铜膜印刷板表面微细蚀刻的初期化过程 |
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| 引用本文： | 吴鼎祥. 激基激光对铜膜印刷板表面微细蚀刻的初期化过程[J]. 光子学报, 2002, 31(6): 762-764 |
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| 作者姓名： | 吴鼎祥 |
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| 作者单位： | 上海大学物理系,祁翔路99号,200436 |
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| 摘 要： | 用KrF激基激光,在稀释的Cl2气体中对镀有铜膜的印刷板进行微细蚀刻的初期化过程.
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| 关 键 词： | 激基激光 微细蚀刻 初期化过程 |
| 收稿时间： | 2001-09-14 |
| 修稿时间： | 2001-09-14 |
PRELIMINARY PROCESS OF MICRO-ETCHING ON THE SURFACE OF COPPER THIN FILM OF CIRCUIT BOARD WITH EXCIMER LASER |
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| Wu Dingxiang Shanghai University. PRELIMINARY PROCESS OF MICRO-ETCHING ON THE SURFACE OF COPPER THIN FILM OF CIRCUIT BOARD WITH EXCIMER LASER[J]. Acta Photonica Sinica, 2002, 31(6): 762-764 |
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| Authors: | Wu Dingxiang Shanghai University |
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| Affiliation: | Wu Dingxiang Shanghai University 200436 |
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| Abstract: | The preliminary process carried out on the micro etching on the surface of copper thin film of circuti board in diluting chlorine gas with KrF Excimer laser are described. |
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| Keywords: | Excimer laser Micro etching Preliminary process |
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