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Precision Evaluation in Kr Adsorption for Small BET Surface Area Measurements of Less Than 1 m2
Authors:Hiroshi Yanazawa  Katsushi Ohshika  Toshiharu Matsuzawa
Institution:(1) Device Development Center, Hitachi Ltd., Ome, Tokyo, 198-8512, Japan;(2) Semiconductor and Integrated Circuit Division, Hitachi Ltd., Kodaira, Tokyo, 187-0022, Japan;(3) Litho Tech Japan Corporation, Kawaguchi, Saitama, 332-0034, Japan
Abstract:A volumetric Kr-adsorption apparatus using a precise capacitance manometer has been developed. A specially designed adsorption cell (CVC: constant volume adsorption cell) utilizing a vacuum jacket (Joyner et al., 1949) is adopted to keep the adsorption cell volume constant regardless of the variation in liquid nitrogen level throughout the experiment. Using the CVC, the pressure change in accordance with liquid N2 supply cycle has been minimized to less than 0.01 Pa compare to about 1 Pa for conventional cell. Time dependent change of the adsorption cell volume and repeatability in its measurements have been demonstrated in detail using helium gas. Good linearity of the BET plot of the Kr adsorption isotherm on several hundred cm2 samples are demonstrated in the relative pressure range from 0.05 to 0.35.
Keywords:Kr adsorption  BET surface area  vacuum jacket  constant volume adsorption cell
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