| 几种光产酸剂产酸效率的测定 |
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| 引用本文： | 褚战星,翟晓晓,王力元,李敏. 几种光产酸剂产酸效率的测定[J]. 北京师范大学学报(自然科学版), 2007, 43(1): 65-67 |
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| 作者姓名： | 褚战星 翟晓晓 王力元 李敏 |
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| 作者单位： | 北京师范大学化学学浣,100875,北京;北京师范大学化学学浣,100875,北京;北京师范大学化学学浣,100875,北京;北京师范大学化学学浣,100875,北京 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 溴酚兰水溶液的紫外吸收会随着体系中含酸的量发生变化,在440 nm吸收峰处一定浓度范围内溴酚兰水溶液的吸光度与溶液中酸浓度成正比,可由此测定酸浓度.用这种方法测定了3种不同类型的光产酸剂在聚乙二醇膜层中在低压汞灯(254 nm)照射下的产酸量.其中三嗪光产酸剂的光照产酸能力最强.
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| 关 键 词： | 光致抗蚀剂 光产酸剂 溴酚兰 指示剂 |
| 修稿时间： | 2006-09-01 |
THE MEASUREMENT OF ACID GENERATING EFFICIENCY OF SEVERAL PHOTOACID GENERATORS |
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| Chu Zhanxing,Zhai Xiaoxiao,Wang Liyuan,Li Min. THE MEASUREMENT OF ACID GENERATING EFFICIENCY OF SEVERAL PHOTOACID GENERATORS[J]. Journal of Beijing Normal University(Natural Science), 2007, 43(1): 65-67 |
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| Authors: | Chu Zhanxing Zhai Xiaoxiao Wang Liyuan Li Min |
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| Affiliation: | College of Chemistry, Beijing Normal University, 100875, Beijing, China |
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| Abstract: | The UV absorbance of bromophenol blue aqueous solution changes with the addition of strong acid.The absorptivity of bromophenol blue aqueous solution at 440 nm is proportional to the acid concentration of the solution in a definite range of concentration.Therefore,the acid concentration can be determined by measuring the absorptivity of bromophenol blue aqueous solution.The acid generating property of three different kinds of PAGs in polyethylene glycol film exposed to low pressure Hg lamp is investigated with this method.The photoacid generating capacity of triazine is the strongest among the three PAGs.The measurements are performed in aqueous solution. |
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| Keywords: | photoresist photoacid generator bromophenol blue indicator |
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