| 微波电子回旋共振-化学气相沉积SiN_x薄膜的光学性能研究 |
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| 引用本文： | 叶超,宁兆元,项苏留,沈明荣,汪浩,甘肇强. 微波电子回旋共振-化学气相沉积SiN_x薄膜的光学性能研究[J]. 光学学报, 1997, 17(4): 489-492 |
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| 作者姓名： | 叶超 宁兆元 项苏留 沈明荣 汪浩 甘肇强 |
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| 作者单位： | 苏州大学江苏省薄膜材料重点实验室，苏州大学分析测试中心 |
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| 摘 要： | 研究了微波电子回旋共振－化学气相沉积ＳｉＮｘ薄膜的光学性能，这种ＳｉＮｘ薄膜具有透光谱宽、透光率高的特点，总结了透光谱、折射率、光隙能随微波功率、基片温度的变化关系
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| 关 键 词： | 氮化硅薄膜，光学性能，微波电子回旋共振－化学气相沉积 |
| 收稿时间： | 1996-03-23 |
Optical Properties of SiN x Films Prepared by Microwave ECR CVD |
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| Affiliation: | Received 23 |
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| Abstract: | The optical properties of SiN x films prepared by microwave ECR CVD have been investigated.The wide transmission spectrum and high transmissivity of SiN x films are obtained. The effects of microwave power and substrate temperature on transmission spectra, refractive index, optical band gap are analysed. |
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| Keywords: | SiN x film optical property microwave electron cyclotron resonance chemical vapor deposition. |
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