Fabrication of three-dimensional structures by three-photon polymerization |
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Authors: | Farsari M Filippidis G Fotakis C |
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Institution: | Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, Heraklion, Crete, Greece. mfarsari@iesl.forth.gr |
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Abstract: | We report the fabrication of three-dimensional structures of submicrometer resolution by three-photon polymerization. This resolution has been achieved by polymerizing ORMOCER, a UV photocurable organic-inorganic hybrid material, with an ultrafast laser irradiation at 1028 nm. To our knowledge, this is the first demonstration of three-photon polymerization, a process that may allow the fabrication of components of very high resolution. |
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