| GaN1-xPx薄膜的结构特性研究 |
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| 引用本文： | 陈敦军,沈 波,张开骁,邓咏桢,范 杰,张 荣,施 毅,郑有炓.GaN1-xPx薄膜的结构特性研究[J].物理学报,2003,52(7):1788-1791. |
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| 作者姓名： | 陈敦军 沈 波 张开骁 邓咏桢 范 杰 张 荣 施 毅 郑有炓 |
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| 作者单位： | 南京大学物理系,南京 210093 |
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| 基金项目： | 国家重点基础研究专项基金（批准号：G20000683）、国家自然科学基金（批准号：601 36020）和国家高技术研究发展计划(批准号：2002AA305304)资助的课题. |
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| 摘 要： | 用金属有机物化学气相沉积技术在蓝宝石衬底上外延了高P组分的GaN1-xP x 薄膜.利用x射线衍射仪和拉曼光谱仪研究了P对GaN1-xPx晶体结构 的影响.研究结果表明：随着P组分比的增加，GaN1-xPx（0002）衍射 峰逐渐向小角度移动，即晶格常数变大；与非掺杂GaN相比，GaN1-xPx薄 膜的拉曼光谱中出现了4个新的振动模
关键词：
1-xPx')" href="#">GaN1-xPx
金属有机物化学气相沉积
x射线衍射
拉曼光谱
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| 关 键 词： | GaN1-xPx 金属有机物化学气相沉积 x射线衍射 拉曼光谱 |
| 收稿时间： | 2002-07-14 |
| 修稿时间： | 2002年7月14日 |
Structural properties of GaN1-xPx films |
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| Chen Dun-Jun,Shen Bo,Zhang Kai-Xiao,Deng Yong-Zhen,Fan Jie,Zhang Rong,Shi Yi and Zheng You-Dou.Structural properties of GaN1-xPx films[J].Acta Physica Sinica,2003,52(7):1788-1791. |
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| Authors: | Chen Dun-Jun Shen Bo Zhang Kai-Xiao Deng Yong-Zhen Fan Jie Zhang Rong Shi Yi and Zheng You-Dou |
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| Abstract: | X-ray diffraction (XRD) and Raman spectra for a series of high-phosphorus-content GaN1-xPx films, with phosphorus content up to 15%, gr own by means of light-radiation heating, low-pressure metal-organic chemical vapor deposition have been investigated. XRD results show that (0002) peaks of GaN1-xPx samples have shifted to smaller angles compared with t hat of undoped GaN sample. The Raman spectra of GaN1-xPx films exh ibit four new vibrational modes compared with undoped GaN sample. These modes are assigned to gap modes related to the Ga—P bond vibrations, local vibrational mode related to the phosphorus clusters, and disorder-activated scattering, respectively. The frequency of the A1(LO) mode is found to decrease with incre asing x. This redshift is attributed to the effects of alloying and strain. |
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| Keywords: | GaN 1-x P x metal organic chemical vapor deposition x ray diffraction Raman spectra |
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