The effect of capping layers on low-angle Bragg peaks from copper-cobalt multilayers

Using simulations based on the Parratt theory for grazing incidence X-ray specular reflectivity, we show that small variations in the thickness of the gold cap used to prevent oxidation in Co/Cu multilayers can have a dramatic effect on the height and position of the low-order Bragg peaks from these multilayers. The height of the specular Bragg peak cannot be used as a measured of interface roughness nor its position used to determine multilayer period unless the cap thickness is known or determined precisely by simulation.