有机分子修饰硅表面*

硅作为一种重要的半导体材料，在微电子领域发挥着极其重要的作用。有机分子修饰硅表面是近年来硅表面化学领域的一个研究热点，引起了研究者的广泛重视。以共价键嫁接在硅表面的有机单分子层能形成稳定、高质量的杂化连接，将赋予传统的硅材料更多新的功能，具有许多其它表面难以比拟的优点。本文针对有机分子修饰硅表面的方法、单层膜的表征和应用，对近年来的最新研究进展进行了综述，并对该方向的今后的发展进行了展望。

Organic Molecules Modified Silicon Surface

Although a number of alternatives to silicon-based materials have been proposed, silicon remains the basic material of electronic industry. Recently research of silicon surface modified organic molecules has become the highlight in surface chemistry. Organic monolayers covalently attached on silicon surface present stable, reproducible and well-controlled solid surfaces, will make much more function relevant to Si-based microelectronics. In this paper, the recent progress are presented on the methods, characterizations and applications of silicon surface modified by monolayers’ organic molecules. Furthermore, the paper brings forward perspectives toward in-depth investigation of organic molecules grafted silicon surface.