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XPS和TOF—SIMS在硬盘驱动器(HDD)磁头表面微污染分析中的应用
引用本文:刘义为,Moulder J F,Vlasak P R,蒋致诚,JIANG Zhi-cheng. XPS和TOF—SIMS在硬盘驱动器(HDD)磁头表面微污染分析中的应用[J]. 理化检验(化学分册), 2001, 37(2): 59-61
作者姓名:刘义为  Moulder J F  Vlasak P R  蒋致诚  JIANG Zhi-cheng
作者单位:1. 广东省东莞市新科磁电厂MTE部,
2. Physical Electronics PHI, 6509 Flying Cloud Drive, Eden Prairie,
3. Visiting Professor from Lanzhou Institute of Chemical Physics, Chinese Academy of Science
摘    要:XPS和TOF-SIMS表面分析仪器联用分析磁头臂焊接位表面有机微污染物成分,找出污染物的来源;XPS能够提供污染物中元素组成及价态信息,而TOF-SIMS能够提供其分子信息。试验证明两者联用是分析表面有机微污染物强有力的手段。

关 键 词:XPS TOF-SIMS 硬盘驱动器 磁头 磁臂焊接位 表面有机微污染物 分析方法
文章编号:1001-4020(2001)02-0059-03
修稿时间:2000-03-17

XPS AND TOF-SIMS ANALYSIS OF MICRO-CONTAMINATION ON THE SURFACE OF MAGNETIC HEAD
LIU Yi wei. XPS AND TOF-SIMS ANALYSIS OF MICRO-CONTAMINATION ON THE SURFACE OF MAGNETIC HEAD[J]. Physical Testing and Chemical Analysis Part B:Chemical Analgsis, 2001, 37(2): 59-61
Authors:LIU Yi wei
Abstract:The analysis of micro organic contamination on the surface of magnetic head by XPS and TOF SIMS is described in this paper. The informations of the composing elements and their valency states are obtained by XPS, and of the molecular structures by TOF SIMS. The analytical results obtained proved that the hyphenation of XPS and TOF SIMS is a very effective method for the surface micro contamination analysis and searching for the sources of the contamination in the data storage industry.
Keywords:XPS  TOF SIMS  Micro contamination
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