隐埋电感工艺的开发与研究

通过蚀刻铜箔结合导通孔连接的方法在四层PCB中制得了大小从120 nH到1 400 nH的三维螺旋隐埋电感,品质因数分别为6～31(测量频率为1 MHz)。所制得隐埋电感既包括垂直轴线,也包括水平轴线三维螺旋隐埋电感线圈;既包括平面螺旋电感和三维螺旋线圈,又包括两者的复合。另外通过对比研究不同物理参数对垂直轴线三维隐埋电感的影响,结果发现在相同周长的情况下,圆形电感略优于方形电感;电感大小和线圈的面积及圈数成正比,与线圈间距成反比;品质因数随着线圈的面积、圈数和线圈间距的变化而略有变化。

Exploitation and Study of Embedded Inductor Process

Embedded inductors were fabricated by copper etching in 4-layer PCBs,and the inductance varies from 120 nH to 1 400 nH while the quality factor is between 6 and 31(f =1 MHz).The structures of the design included 3D vertical and horizontal spiral embedded inductors.Different kinds of embedded inductors-2D spiral inductor,3D spiral inductor and the combination were fabricated.The study showed that circular inductor is better than rectangular one with the same circumference.And the inductance is proportional to the area,turns of the spiral windings,while it is inversely proportional to the inter-layer distance.Moreover,the quality factor of the embedded inductor is also slightly changed with the area,turns and the inter-layer distance of the spiral windings.