Direct measurement of the complex refractive index of thin foils in the XUV spectral range by point diffraction interferometry

In this paper, we demonstrate the application of point diffraction interferometry to determine the complex refractive index of thin foils in the extreme ultraviolet spectral range. Results are cross-checked by an independent interferometric measurement of the refractive index and a direct transmission measurement of the foils. As the light source, we apply high-order harmonics of a titanium-sapphire laser generated in a gas jet. This interferometric method has the advantage to simultaneously and directly deliver the refractive and absorptive part of the refractive index without relying on the Kramers–Kronig relations or the Fresnel equations. We present results for a set of materials (aluminum, silicon, germanium, boron, and parylene), which are of interest for the design of bandpass filters or multilayer coatings.