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Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1?xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining
Authors:M Jilek  T Cselle  P Holubar  M Morstein  M G J Veprek-Heijman and Stan Veprek
Institution:(1) SHM Ltd., CZ-78803, Novy Malin 266, Czech Republic;(2) PLATIT AG, Moosstr. 68, CH-2540 Grenchen, Switzerland;(3) Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching/Munich, Germany
Abstract:The development of novel superhard nanocomposite, nano-layered coatings and of the coating technology based on vacuum arc evaporation from rotating electrodes is summarized. The nc-Al1-xTixN/a-Si3N4 coatings in which the nanocrystals of the Al-rich solid solution with the fcc crystal structure of TiN are imbedded into a thin matrix of amorphous silicon nitride show high thermal stability, oxidation resistance and excellent performance in dry, fast machining that is superior to the state-of-the-art (Ti1-xAlx)N coatings.
Keywords:Superhard nanocomposites  industrial applications  (AlTi)N/Si3N4  Al–  Ti–  Si–  N  vacuum arc
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