Research of Plasma Characteristics of the Radio-Frequency Discharge in O2 and Its Mixtures

Electron mean energy and the effects of gas mixture are studied theoretically and experimentally. The electron mean energy in O₂ and its mixtures is obtained by solving Boltzmann's equation. The experiments of the Langmuir probe system and spectral analysis are carried out. It is shown that electron temperature goes down with the increasing pressure, narrowing pulse width and the addition of helium and argon. According to the intensity of oxygen atom at 777.19nm, xenon is more effective in inhibition of O₂ decomposition than helium and argon.