Beam delivery system with a non-digitized diffractive beam splitter for laser-drilling of silicon |
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| Affiliation: | 1. Toyo University, 2100 Kujirai, Kawagoe, Saitama 350-8585, Japan;2. Seiko Epson Corporation, Fujimi-cho, Fujimi 281, Nagano 399-0293, Japan;1. Department of Photonics, Feng Chia University, Taichung, Taiwan, ROC;2. Department of Electro-Optical Engineering, National United University, Miaoli, Taiwan, ROC;1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, China;2. University of Chinese Academy of Sciences, Beijing 100049, China;3. Xuchang Vocational College, Xuchang 461000, Henan, China;4. School of Computer Science & Technology, Sichuan University, Chengdu 610064, China;1. College of Physics and Electronic Engineering, Nanyang Normal University, Nanyang 473061, China;2. College of Computer and Information Technology, Nanyang Normal University, Nanyang 473061, China |
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| Abstract: | We report a beam-delivery system consisting of a non-digitized diffractive beam splitter and a Fourier transform lens. The system is applied to the deep-drilling of silicon using a nanosecond pulse laser in the manufacture of inkjet printer heads. In this process, a circularly polarized pulse beam is divided into an array of uniform beams, which are then delivered precisely to the process points. To meet these requirements, the splitter was designed to be polarization-independent with an efficiency>95%. The optical elements were assembled so as to allow the fine tuning of the effective overall focal length by adjusting the wavefront curvature of the beam. Using the system, a beam alignment accuracy of<5 μm was achieved for a 12-mm-wide beam array and the throughput was substantially improved (10,000 points on a silicon wafer drilled in ~1 min). This beam-delivery scheme works for a variety of laser applications that require parallel processing. |
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| Keywords: | Beam delivery optics Diffractive beam splitters Beam array Laser materials processing High-power lasers |
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