Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference |
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| Affiliation: | 1. College of Information and Communication Engineering, Harbin Engineering University, Harbin, Heilongjiang 150001, China;2. Key Laboratory of Advanced Marine Communication and Information Technology, Ministry of Industry and Information Technology, Harbin Engineering University, Harbin, Heilongjiang 150001, China;1. Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, China;2. School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, Singapore;3. Department of Physics, Chemistry, and Biology, Linköping University, Linköping SE-58183, Sweden |
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| Abstract: | Conventional multi-wavelength phase-shifting interferometry utilizes two or three monochromatic light sources, such as lasers, to realize the measurement of the surface topography with large discontinuity. In this paper, the white light source, with a single-chip CCD color camera, is used to accomplish multi-wavelength phase-shifting interferometry. In addition, we propose an algorithm which combines white light phase-shifting algorithm, equivalent wavelength method and fringe order method to achieve measuring and calibrating the micro-structures ranging from nanometer scale to micrometer scale. Finally, the proposed method is validated by a traceable step height standard. |
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| Keywords: | White light interference Multi-wavelength Color image Phase-shifting algorithm |
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