Affiliation: | 1. State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;2. Department of Precision Instrument, Tsinghua University, Beijing 100084, China;1. School of Science,Wuhan university of technology, Wuhan 430070, China;2. Department of Electrical and Computer Engineering, University of North Carolina at Charlotte, Charlotte, NC 28223 USA;1. School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China;2. Department of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China;3. Shanghai Key Lab of Advanced Manufacturing Environment, Shanghai 200240, China |