Preparation and characterization of Pd-Ag alloy composite membrane with magnetron sputtering |
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Authors: | Hongbin Zhao Guoxing Xiong N Stroh H Brunner |
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Institution: | (1) State Key Laboratory of Catalysis, Dalian Institute of Chemical Physics, Chinese Academy of Sciences, 116023 Dalian, China;(2) Fraunhofer Institute of Interfacial Engineering and Biotechnology, Nobelstrasse 12, D-70569 Stuttgart, Germany |
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Abstract: | A Pd-Ag (24 wt%) alloy composite membrane was prepared by the magnetron sputtering. A γ-A1203 membrane was synthesized by the sol-gel method and used as substrate of the Pd-Ag alloy film. The process parameters of the
magnetron sputtering were optimized as a function of the compactness of the Pd-Ag alloy film. The best membrane with a thickness
of 1 μm was produced with a sputtering pressure of 2.7 Pa and a substrate temperature of 400°C. The membrane had an H2/N2 permselectivity of 51.5-1000 and an H, permeation rate of 0.036-1.17 x 10-5cm3/cm2.s. Pa, depending on operating conditions.
Project supported by the National Natural Science Foundation of China (Grant No. 29392003) and the Chinese Academy of Sciences
(Grant No. KMX 85-23), German BMBF and FhG-IGB. |
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Keywords: | Pd-Ag membrane Al2o3 membrane sol-gel sputtering H2 separation |
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