Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: a transparent and conductive platform for microdevices |
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| Authors: | S Beke L Kőrösi K Sugioka K Midorikawa I Dékány |
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| Institution: | (1) State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai, 201800, China;(2) Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai, 201800, China;(3) Graduate School of the Chinese Academy of Sciences, Beijing, 100039, China;(4) Laser Technology Laboratory, RIKEN-Advanced Science Institute, Hirosawa 2-1, Wako Saitama, 351-0198, Japan; |
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| Abstract: | A new method for embedding transparent and conductive two- and three-dimensional microstructures in glass is presented. We
show that the internal surface of hollow structures fabricated by femtosecond-laser direct writing inside the photosensitive
glass can be coated by indium tin oxide (Sn-doped In2O3, ITO) using a sol-gel process. The idea of combining two transparent materials with different electrical properties, i.e.,
insulating and conductive, is very promising and hence it opens new prospects in manufacturing cutting edge microdevices,
such as lab-on-a-chips (LOCs) and microelectromechanical systems (MEMS). |
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