Induction Plasma Synthesis of Graphene Nano-flakes with In Situ Investigation of Ar–H2–CH4 Plasma by Optical Emission Spectroscopy |
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| Authors: | Mohanta Antaryami Lanfant Briac Leparoux Marc |
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| Institution: | 1.Laboratory for Advanced Materials Processing, Empa–Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602, Thun, Switzerland
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| Abstract: | Plasma Chemistry and Plasma Processing - Synthesis process of graphene nano-flakes produced in radio-frequency inductively coupled plasma system by axially injecting CH4 into Ar–H2 plasma is... |
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