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Experimental and Theoretical Optimization of Radio Frequency Hollow Cathode Discharge |
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| Authors: | Jiang Xin-Xian Li Wei-Ping Xu Shao-Wei He Feng Chen Qiang |
| Affiliation: | 1.Department of Mechanical Engineering, School of Physics, Tsinghua University, Beijing, 100084, China ;2.North Microelectronics Co. Ltd, Beijing, 100176, China ;3.The Quartermaster Research Institute of General Logistics Department, Chinese People Liberation Army, Beijing, 100010, China ;4.China Academy of Space Technology, Beijing Institute of Space Mechanics and Electricity, Beijing, 100094, China ;5.School of Physics, Beijing Institute of Technology, Beijing, 100081, China ;6.Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing, 102600, China ; |
| Abstract: | Plasma Chemistry and Plasma Processing - In this paper, the electron density in radio frequency (RF) hollow cathode discharge (HCD) is investigated in experiments and in simulation based on... |
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