Die Zerstäubung von Kupfer durch Ne+-, Ar+-, Kr+- und Xe+-Ionen im Energiebereich von 75keV bis 1MeV |
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Authors: | Günter Dupp Arthur Scharmann |
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Institution: | 1. I. Physikalisches Institut der Universit?t Gie?en, Deutschland
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Abstract: | Using a 1,3 MeV Van de Graaff-accelerator the sputtering ratioS of polycristalline copper bombarded by normally incident Ne+-, Ar+-, Kr+-, and Xe+-ions was measured in the energy range from 75 keV to 1 MeV. In the case of Kr+-ions a broad, plateau-like maximum of the sputtering-curveS=f(E) was found at about 100 keV, for Xe+-ions a more pronounced maximum at about 125 keV. The results are discussed applying the theories ofGoldman-Simon, Pease, andMartynenko. |
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