| 洁净房间内亚微米粒子的沉积行为 |
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| 引用本文： | 亢燕铭,王明星. 洁净房间内亚微米粒子的沉积行为[J]. 应用力学学报, 2000, 17(4): 121-125 |
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| 作者姓名： | 亢燕铭 王明星 |
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| 作者单位： | 1. 西安建筑科技大学,西安,710055;中国科学院大气物理研究所,北京,100029
2. 中国科学院大气物理研究所,北京,100029 |
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| 基金项目： | 陕西省自然科学基金!(98D01)，大气边界层物理与大气化学国家重点实验室开放基金 |
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| 摘 要： | 采用二维滞止流模型，讨论了工业洁净室内不同送风速度下，气溶胶粒子分别受重力和电场力作用及二者联合作用时在工作台表面或晶片上的沉积特征。通过与相关文献提供的实验数据的对比，确认了这种预报超细粒子沉积行为的方法。
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| 关 键 词： | 洁净室 气溶胶粒子 滞止流 沉积 送风气流 |
Deposition Behaviours of Sub-Micron Particles in Industrial Clean Rooms |
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| Kang Yanming,Wang Mingxing. Deposition Behaviours of Sub-Micron Particles in Industrial Clean Rooms[J]. Chinese Journal of Applied Mechanics, 2000, 17(4): 121-125 |
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| Authors: | Kang Yanming Wang Mingxing |
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| Abstract: | The deposition features of fine aerosol particles on horizontal work benches or semiconductor wafers in industrial clean rooms, which affected by gravitational and electrostatic forces, are analyzed by employing the assumption of two-dimen sional stagnation point flow model. The comparison between theory and the experim ental data presented in the literature indicates that the method is applicable f or predicting the deposition velocities of sub-micron particles. |
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| Keywords: | clean room aerosol particle stagnation-point flow deposition. |
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