单级衍射量子点阵光栅的聚焦离子束直写法制备及光学性能检测

采用聚焦离子束直写技术,成功制作了面积为200μm×200μm,线密度500 mm 1,圆孔直径800 nm,金吸收体厚度为500 nm的单级衍射量子点阵光栅.研究了该光栅在波长442 nm激光下不同传输距离的衍射特性以及相对衍射效率.实验结果表明,量子点阵光栅不存在高级衍射,只保留了±1级和0级衍射,具有良好的单级衍射特性.1级衍射与0级衍射间距随传输距离的增大而增大,实测值与理论计算值相符.

Fabrication and optical property characterization of quantum-dot-array diffraction grating with single order diffraction based on focused ion beam

Quantum-dot-array diffraction grating(QDADG), with an area of 200 μm×200 μm, a line density of 500 line/mm, an aperture size of 800 nm and a gold absorber of 500 nm thick, is successfully fabricated by focused ion beams. The diffraction properties and relative diffraction efficiencies of QDADG are measured at different transfer distance for 442 nm laser. It is shown that the high-order diffraction is removed from the spectra with only the ±1 and 0 order diffraction lines reserved. Moreover, in accordance with the calculated values obtained using the grating equation, variations of space between the 1^st order and the 0^th order increase gradually with the increase of transfer distance.