Total reflection X-ray fluorescence spectrometry for quantitative surface and layer analysis

Measurements of X-ray fluorescence spectra versus grazing incident angles provide information on elemental composition as well as density and thickness of near surface layers. Calculations of fluorescence intensities are presented, which are used for the evaluation of data obtained by total reflection X-ray fluorescence (TXRF) spectrometry. The calculation is based on a matrix formalism to account for standing wave phenomena due to transmission and reflection in layered material. For the determination of concentrations the model makes additional use of the fundamental parameter technique in order to include absorption and enhancement effects of the fluorescence radiation. On the basis of experimental data some capabilities of this nondestructive and contactless probing technique are presented.