Ion－Implanted Waveguides in a Nd^3＋－Doped Silicate Glass

Monomode enhanced-index Nd^3 -doped silicate glass waveguides fabricated by ion implantation are reported.The Nd^3 -doped silicate glass was implanted by 3.0 MeV B^ ions, 3.0 MeV 0^ ions and 4.5 MeV Ni^2 ions,respectively. A prism-coupling method was carried out to measure dark modes in the Nd^3 -doped silicate glassusing a model 2010 prism coupler. The moving fibre method was applied to measure the waveguide propagationloss. After a moderate annealing, the 3.0-MeV B^ -ion implanted waveguide loss is about 3.54 dB/cm; the 3.0-Me V O^ -ion implanted waveguide loss is about 5.36 dB/cm; and the 4.5-MeV the Ni^2 -implanted waveguide lossis about 7.55dB/cm. The results show that with the increasing ion mass, the loss in implanted waveguide isincreased.