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| 1×4 MMI Splitter Based on Rib SOI Waveguide | |
| 作者姓名： | WEI Hongzhen YU Jinzhong LIU Zhongli Wang Qirning FANG Changshui |
| 作者单位： | WEI Hongzhen:State Key Laboratory on Integrated optoelectronics, Institute of Semiconductors, The Chinese Academy of Sciences, Beijing 100083, China YU Jinzhong:State Key Laboratory on Integrated optoelectronics, Institute of Semiconductors, The Chinese Academy of Sciences, Beijing 100083, China LIU Zhongli:Microelectronics center, Institute of Semiconductors, The Chinese Academy of Sciences, Beijing 100083, China Wang Qirning:State Key Laboratory on Integrated optoelectronics, Institute of Semiconductors, The Chinese Academy of Sciences, Beijing 100083, China FANG Changshui:State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China |
| 基金项目： | Supported by the National Natural Science Foundation of China under grant No.69896260 and No. 69990540. |
| 摘 要： | |
| 收稿时间： | 2000/1/31 |
1×4 MMI Splitter Based on Rib SOI Waveguide |
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| WEI Hongzhen,YU Jinzhong,LIU Zhongli,Wang Qirning,FANG Changshui.1×4 MMI Splitter Based on Rib SOI Waveguide[J].中国激光(英文版),2000,9(6):525-530. | |
| Abstract: | In this paper, a 1×4 MMI splitter based on silicon-on-insulator (SOI) by effective index method and guide mode method is designed. The fabrication tolerance was analyzed. The device was fabricated and near-field output was obtained. |
| Keywords: | SOI multimode interference splitter integrated optics |